Need Help with
Flow and Differential Pressure Sensors?

Ask an Expert >

MEMS Flow and Pressure Modules


  • Overview
  • Specifications
  • Features and Benefits
  • Applications

The MFA1100R is a gas flow sensing module based on MEMSIC’s proprietary thermal gas flow technology.  It can measure up to 100SLM flow rate with +/-1.5% accuracy (after external calibration), and achieves a turndown ratio greater than 500:1. It includes on-chip circuitry for converting gas flow rates to a differential analog voltage with very high (better than 1%) repeatability. The device runs from a single cell battery, and has a low power sleep mode for managing battery life.

The MFA1100R is a true mass flow meter, and can easily be configured and integrated into an electronic intelligent gas meter. Customized versions are available, contact MEMSIC for more information.

Type Flow
Range 0.27 to 100 SLM
Detectable Signal 0.26 SLM
Accuracy 1.5% (10 - 100 SLM) 3% (0.26 - 10 SLM)
Output Analog
Sleep Mode 0.001
Supply Voltage 2.7 to 5.5
  • Mass flow sensor
  • No moving parts for high reliability
  • Wide measuring range (0.27 – 100 SLM)
  • Outstanding hysteresis and repeatability (<1%)
  • High measuring accuracy
    • <3% for 0.27 – 10 SLM
    • <1.5% for 10 - 100 SLM
  • Single 2.7-5.5V supply
  • RoHS compliant

Residential gas meter
Medical flow measurement and control
Industrial flow measurement and control